Light Source Optimization of 3D Inner Contour Measurement System Based on Ring Beam Method

Abstract

Abstract Ring beam method is a simple and efficient method for measuring three-dimensional internal contour. The whole three-dimensional inner contour is stitched from the contour lines of cross-sectional images collected during scanning. The contour image with uniform and moderate light intensity and fine ring band is beneficial to the calculation of contour line extraction algorithm. In practice, due to the quality of the ring beam and the modulation effect of the sample surface microstructure, the light band of the contour image has local widening, overexposure and speckle phenomena, which directly affect the contour extraction effect. The ring beam generation system is optimized here, which makes the whole system have better size adaptability and convenient adjustment. In addition, experiments results show that the measurement repeatability of the cross-sectional profile obtained after the light source optimization has been effectively improved.