Effects of Gas Composition in Producing Carbon Nanomaterials by Plasma Enhanced Chemical Vapor Deposition

Abstract

Abstract Carbon nanomaterials are becoming new materials which can be used in many fields including transistors, sensors, displays, hydrogen storage, capacitors, catalyst supporters and so on. PECVD is an important method for producing carbon nanomaterials. However, it remains a challenge to control the final production of the PECVD process. This paper tries to figure out the gas factors influencing the growth of different carbon nanomaterials. This paper begins with a brief introduction of PECVD and the growth regime of carbon nanowalls and carbon nanotubes. It discusses how the Argon, carbon source, hydrogen and other gas affect the growth of CNMs. The paper ends with a discussion on the practical influence of confirming the function of each gas.