Analysis of the possibility of creating an acoustic velocity sensor using GaN epitaxial films

Abstract

Abstract This paper results in results of analyzing the possibility of creating an acoustic velocity sensor using epitaxial GaN films. Technology for the fabrication of a microelectromechanical acoustic velocity sensor was developed and a prototype of the sensor was produced. The simulation of the characteristics of the obtained acoustic velocity sensors was carried out on the basis of the measured electrical characteristics, where the sensitivity and the directional pattern were determined.