Estimation of thermodynamic stability of isoperiodic epitaxial structures whith GaInSbAs and GaInAsP solid solutions

Abstract

Abstract The work studied the thermodynamic stability of GaInSbAs, GaInAsP heterosystems on different substrates. The isotherms of spinodal decomposition caused by chemical changes in the internal energy of the alloy and by elastic stresses at the layer-substrate interface are obtained with the model of quasiregular solutions. It has been found that elastic stresses lead to an expansion of the region of thermodynamic stability of isoperiodic solid solutions for GaSb substrates and a decrease in the critical temperature. The developed model can be using to selection of the technological modes and parameters of epitaxial growth.