High energy electron-beam irradiation effects in Si-SiOxstructures
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/682/i=1/a=012012/pdf
Reference21 articles.
1. Total ionizing dose effects in MOS oxides and devices
2. Ion and electron irradiation-induced effects in nanostructured materials
3. Fabrication and analysis of the nanometer-sized structure of silicon by ultrahigh vacuum field emission transmission electron microscope
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