Simulation of electron moving in RF capacitively coupled discharge
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/1058/i=1/a=012044/pdf
Reference21 articles.
1. Modeling of radio-frequency capacitive discharge under atmospheric pressure in Argon
2. Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models
3. Fast Spectral Methods for the Fokker–Planck–Landau Collision Operator
4. On the accuracy of the direct discrete simulation of the Landau collision integral by the Boltzmann integral
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