Spatial structure of electrons and fluorine atoms in a RF magnetron plasma
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference14 articles.
1. Hollow‐cathode‐enhanced magnetron sputtering
2. Diagnostics of dual source reactive magnetron sputter deposition of aluminum nitride and zirconium nitride thin films
3. Computational Studies on the Shape and Control of Plasmas in Magnetron Sputtering Systems
4. CF3,CF2and CF Radical Measurements in RFCHF3Etching Plasma Using Infrared Diode Laser Absorption Spectroscopy
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