Experimental study of hydrogen plasma breakdown in a 2.45 GHz microwave discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/22/i=1/a=015026/pdf
Reference29 articles.
1. Review on high current 2.45 GHz electron cyclotron resonance sources (invited)
2. Plasma-based ion implantation and deposition: a review of physics, technology, and applications
3. Plasma breakdown diagnostics with the biased disc of electron cyclotron resonance ion source
4. Using Langmuir probes to measure the plasma decay rates in pulsed RF magnetron discharges
5. Studies of plasma breakdown and electron heating on a 14 GHz ECR ion source through measurement of plasma bremsstrahlung
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2. Effects of gas adsorbed on solid surface during gas breakdown in electron cyclotron resonance discharges;Plasma Sources Science and Technology;2021-12-01
3. Time resolved plasma diagnostics for pulsed 2.45 GHz hydrogen discharges;Review of Scientific Instruments;2021-11-01
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