Simulation study of stochastic heating in single-frequency capacitively coupled discharges with critical evaluation of analytical models
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Published:2013-06-03
Issue:3
Volume:22
Page:035014
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Sharma S,Turner M M
Subject
Condensed Matter Physics
Cited by
38 articles.
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