Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/22/i=4/a=045008/pdf
Reference25 articles.
1. The multipole resonance probe: characterization of a prototype
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3. Industrial Plasma Technology
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