Electrical and optical characterization of a pulsed discharge in an inverted cylindrical magnetron
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/23/i=4/a=045011/pdf
Reference19 articles.
1. Design advances and applications of the rotatable cylindrical magnetron
2. HTSC thin film growth by inverted cylindrical magnetron sputtering
3. Superconducting and structural properties of YBaCuO thin films deposited by inverted cylindrical magnetron sputtering
4. Design, characterisation and operation of an inverted cylindrical magnetron for metal deposition
5. Elaboration of a wide range of TiO2micro/nanostructures by high power impulse inverted cylindrical magnetron sputtering
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Comparative study of discharge characteristics and associated film growth for post-cathode and inverted cylindrical magnetron sputtering;Pramana;2019-02-15
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