Generation of uniform electron beam plasma in a dielectric flask at fore-vacuum pressures
Author:
Funder
Ministry of Education and Science of the Russian Federation
Russian Foundation for Basic Research
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference49 articles.
1. Fore-vacuum plasma-cathode electron sources
2. Theoretical overview of the large-area plasma processing system (LAPPS)
3. Generating stationary electron beams by a forevacuum plasma source at pressures up to 100 Pa
4. Electron beam treatment of non-conducting materials by a fore-pump-pressure plasma-cathode electron beam source
5. Charge compensation in an insulated target bombarded by a pulsed electron beam in the forevacuum pressure range
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