Sputtering effects in a helicon plasma with an additional immersed antenna
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference14 articles.
1. Measurements of potentials and sheath formation in plasma immersion ion implantation
2. Electrostatic Coupling of Antenna and the Shielding Effect in Inductive RF Plasmas
3. Resonant cavity modes of a bounded helicon discharge
4. Absolute measurements and modeling of radio frequency electric fields using a retarding field energy analyzer
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