A large-diameter uniform plasma produced by a plane slotted ECR antenna
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference11 articles.
1. Polymerization of Organosilicones in Microwave Discharges
2. Reactive Ion Beam Etching Using a Broad Beam ECR Ion Source
3. Production of a Large-Diameter Uniform ECR Plasma with a Lisitano Coil
4. Electron Cyclotron Resonance Devices with Permanent Magnets for Production of Large-Diameter Uniform Plasmas
5. Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets
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1. Qualification of uniform large area multidipolar ECR hydrogen plasma;Physics of Plasmas;2022-04
2. Verification of Polarization Reversal of Electromagnetic Waves with Electron Cyclotron Frequency Controlling Plasma-Structure Formation;Plasma and Fusion Research;2007
3. Absorption and penetration of left-hand polarized waves related to polarization reversal causing electron cyclotron resonance;Physical Review E;2006-07-28
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5. Development of a new microwave discharge type ion engine;Vacuum;2004-04
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