Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network
Author:
Funder
Swiss Commission for Technology and Innovation
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=6/a=065015/pdf
Reference15 articles.
1. Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part I: basic concepts
2. Resonant planar antenna as an inductive plasma source
3. Plasma generation by inductive coupling with a planar resonant RF network antenna
4. Resonant RF network antennas for large-area and large-volume inductively coupled plasma sources
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3. Corrigendum: Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry: II. Measurements on a resonant network (2015 Plasma Sources Sci. Technol. 24 065015);Plasma Sources Science and Technology;2017-11-06
4. Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source;Plasma Sources Science and Technology;2017-02-23
5. Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part I: basic concepts;Plasma Sources Science and Technology;2015-11-06
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