Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence-Reference-Cited by-同舟云学术

Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence

Published:2005-10-27 Issue:4 Volume:14 Page:766-776
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Biloiu Costel,Sun Xuan,Choueiri Edgar,Doss Forrest,Scime Earl,Heard John,Spektor Rostislav,Ventura Daniel

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference68 articles.

1. Measurement and modeling of ion energy distribution functions in a low pressure argon plasma diffusing from a 13.56 MHz helicon source

2. Effect of wall charging on an oxygen plasma created in a helicon diffusion reactor used for silica deposition

3. Plasma injection with helicon sources

4. Design and performance of distributed helicon sources

5. Fast anisotropic etching of silicon in an inductively coupled plasma reactor

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