Hairpin resonator probe measurements in RF plasmas
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference15 articles.
1. Microwave resonator probe for localized density measurements in weakly magnetized plasmas
2. The hairpin resonator: A plasma density measuring technique revisited
3. Plasma Sheath Formation by Radio-Frequency Fields
4. A comparison of a passive (filtered) and an active (driven) probe for RF plasma diagnostics
5. Bias voltage in finite length, cylindrical and coaxial radio‐frequency discharges
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