Low-pressure plasma sources for etching and deposition
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Published:2002-08-01
Issue:3A
Volume:11
Page:A74-A79
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Cooke M J,Hassall G
Subject
Condensed Matter Physics
Cited by
23 articles.
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