A comparative study of dc biased RF impedance probes and Langmuir probes for the measurement of processing plasma parameters
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference18 articles.
1. Determining electron temperature for small spherical probes from network analyzer measurements of complex impedance
2. Characteristics of the plasma impedance probe with constant bias
3. The LC resonance probe for determining local plasma density
4. A study of the accuracy of various Langmuir probe theories
5. Measurement of electron energy distribution in low-pressure RF discharges
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3. A photodiode array and Langmuir probe for characterizing plasma in GLAST-III tokamak device;Measurement;2018-09
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