Influence of operating frequency and coupling coefficient on the efficiency of microfabricated inductively coupled plasma sources-Reference-Cited by-同舟云学术

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Influence of operating frequency and coupling coefficient on the efficiency of microfabricated inductively coupled plasma sources

Published:2002-05-18 Issue:3 Volume:11 Page:229-235
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Iza F,Hopwood J

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference14 articles.

1. A Molecular Emission Detector on a Chip Employing a Direct Current Microplasma

2. A dc Microplasma on a Chip Employed as an Optical Emission Detector for Gas Chromatography

3. A capacitively coupled microplasma (CCµP) formed in a channel in a quartz wafer

4. Fabrication and characterization of a micromachined 5 mm inductively coupled plasma generator

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