Numerical study of Si nanoparticle formation by SiCl4hydrogenation in RF plasma
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/25/i=2/a=025011/pdf
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1. Highly Efficient Silicon Nanoarray Solar Cells by a Single-Step Plasma-Based Process
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