Temporally and spatially resolved plasma parameters and EEDF measurements in a low-frequency discharge
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Published:1995-11-01
Issue:4
Volume:4
Page:561-570
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Anderson C A,Graham W G
Subject
Condensed Matter Physics
Cited by
6 articles.
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