Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H2/C2H2and Ar/H2/CH4plasmas used for the synthesis of nanocarbon structures-Reference-Cited by-同舟云学术

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H2/C2H2and Ar/H2/CH4plasmas used for the synthesis of nanocarbon structures

Published:2005-12-02 Issue:1 Volume:15 Page:42-51
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Gordillo-Vázquez F J,Camero M,Gómez-Aleixandre C

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference33 articles.

1. Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions

2. Spectroscopic determination of carbon dimer densities in and plasmas

3. Spectroscopic diagnostics and modeling of Ar∕H2∕CH4 microwave discharges used for nanocrystalline diamond deposition

4. Crystalline diamond growth in thin films deposited from a CH4/Ar rf plasma

5. Diagnostic studies of species concentrations in a capacitively coupled RF plasma containing CH4-H2-Ar

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