Ionization kinetics and E–H mode transition in a noble gas, low-pressure pulsed ICP discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference10 articles.
1. Time-resolved current and voltage measurements on a pulsed rf inductively coupled plasma†
2. Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas
3. Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar
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