Cost-effective microfabrication of sub-micron-depth channels by femto-laser anti-stiction texturing
Author:
Funder
Ministerio de Economía y Competitividad
Publisher
IOP Publishing
Subject
Biomedical Engineering,General Medicine,Biomaterials,Biochemistry,Bioengineering,Biotechnology
Link
https://iopscience.iop.org/article/10.1088/1758-5090/ab6665/pdf
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