Combination of in-situ ion beam analysis and thermal desorption spectroscopy for studying deuterium implanted in tungsten

Abstract

Abstract We demonstrate a combinatorial approach integrating ion implantation followed by thermal annealing and simultaneous in situ ion beam analysis with thermal desorption spectroscopy in a single set-up. Atomic and molecular deuterium ions of 3 keV were implanted into bulk tungsten with doses exceeding 1 × 1022 ions m−2. Depth profiling of both, protium and deuterium was performed by elastic recoil detection analysis, while simultaneously the outgassing rates of molecular deuterium by thermal desorption spectroscopy were monitored during temperature ramps from room temperature to ≈1400 K. The combination of the two techniques in situ is shown capable to identify the distinct retention behavior of deuterium at different temperatures and in different reservoirs, e.g. located close to the surface and diffused deep into the material. Ex-situ scanning electron microscopy confirmed blister formation, and recovery of the initial surface morphology after high temperature annealing, in analogy to comprehensive ex-situ studies.