Numerical investigation of a radio frequency sheath with supra-thermal electrons in the presence of the magnetic field
Author:
Funder
National Key R&D Program of China
National Natural Science Foundation of China
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Mathematical Physics,Atomic and Molecular Physics, and Optics
Link
https://iopscience.iop.org/article/10.1088/1402-4896/ac198c/pdf
Reference31 articles.
1. Radio frequency sheaths in an oblique magnetic field
2. ENERGY DEPENDENCE OF ION-INDUCED SPUTTERING YIELDS FROM MONATOMIC SOLIDS AT NORMAL INCIDENCE
3. Ion energy-angle distribution functions at the plasma-material interface in oblique magnetic fields
4. Ion energy distributions in rf sheaths; review, analysis and simulation
5. Modeling of the sheath and the energy distribution of ions bombarding rf-biased substrates in high density plasma reactors and comparison to experimental measurements
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