Author:
Xiao Le,Dai Wenjie,Zhang Guoxiang,Zhou Zijie,You Bihui,Sun Xiangming,Huang Guangming,Gao Chaosong,Zhao Cong,Yang Ping,Liu Jiajia,Guo Di,Lu Yunpeng,Zhou Yang,Zhang Ying,Xie Lirong,Yang Ming,Yi Liwen,Tong Qiaomu,Feng Wanhan,Tian Ziyang
Abstract
Abstract
We present the design of a prototype MAPS sensor MIC6_V1 based on a 55 nm Quad-well CMOS Image Sensor process for the CEPC vertex detector. A new node-based, data-driven, parallel readout architecture is implemented to achieve high spatial resolution, fast readout, and low power consumption. The size of MIC6_V1 is 2.8 mm × 2.8 mm, which contains a pixel matrix of 64 rows by 64 columns, and the pixel size is 23.6 μ m × 20 μ m. The integration time is 5 μs, and the hit arrival time measurement accuracy is 10 ns.