Author:
Cao B.,Jing L.,He R.,Yin R.,Huang J.,Liu N.,Niu X.,Fu F.,Han W.,Wang Y.,Zhao C.
Abstract
Abstract
The Monolithic Active Pixel Sensor (MAPS) is a good candidate for the inner
tracking system of the Electron–Ion Collider in China (EicC). Hence, a
MAPS with a pixel pitch of ∼30 µm is being designed. Two
130 nm CMOS processes have been proposed as candidates for this MAPS
design. The first one is a commercial standard twin-well low-resistivity
(<50 Ω cm−3) process, and the other
one is a quadruple-well high-resistivity (>1 kΩ cm−3)
process. A 3-dimensional TCAD model of the pixels has been established to
evaluate the Minimum Ionizing Particles (MIPs) induced charge collection in
these two processes. This paper will discuss the study of charge collection
efficiency, charge collection time, and charge sharing among pixels.
Subject
Mathematical Physics,Instrumentation
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