Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy-Reference-Cited by-同舟云学术

Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy

Published:2001-09-05 Issue:18 Volume:34 Page:2854-2861
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Seo Dong-cheol,Chung Tae-hun

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/34/i=18/a=320/pdf

Reference32 articles.

1. Mode Change of 1 MHz Discharge in O2Gas at Low Pressure

2. Probe Diagnostics in Negative Ion Containing Plasma

3. Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

4. Imaging of atomic oxygen in a microwave excited oxygen plasma with two-dimensional optical emission spectroscopy

5. The operation of Langmuir probes in electro-negative plasmas

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