A system for measuring surface roughness by total integrated scattering-Reference-Cited by-同舟云学术

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A system for measuring surface roughness by total integrated scattering

Published:2011-12-02 Issue:50 Volume:44 Page:505103
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Mazule L,Liukaityte S,Eckardt R C,Melninkaitis A,Balachninaite O,Sirutkaitis V

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Multiscale roughness in optical multilayers: atomic force microscopy and light scattering

2. Surface characterization of optical components for the DUV, VUV and EUV

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