Plasma-aided nanofabrication: where is the cutting edge?
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/40/i=8/a=S01/pdf
Reference147 articles.
1. Nanoparticles and Nanostructured Films
2. Colloquium:Reactive plasmas as a versatile nanofabrication tool
3. Carbon nanotube growth by PECVD: a review
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