Thomson light scattering measurements of electron temperature and density in the transition of a capacitive rf discharge in helium
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/29/i=4/a=014/pdf
Reference7 articles.
1. Time‐resolved plasma parameter measurements in a low‐frequency rf glow discharge
2. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
3. Electron kinetics in weakly ionized helium under DC and HF applied electric fields
4. NONLINEAR PHENOMENA IN A PLASMA LOCATED IN AN ALTERNATING ELECTROMAGNETIC FIELD
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