An appraisal of the mass spectrometer diagnostic technique in the study of afterglow plasmas
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/6/i=12/a=306/pdf
Reference56 articles.
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4. Mass Spectrometric Study of Argon Afterglow Plasmas
5. Experimentelle Untersuchungen über den Einfluß der Wand-Raumladungsschicht bei der Extraktion positiver Ionen
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2. Time‐resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments;Journal of Applied Physics;1994-02
3. Temperature dependencies of ternary ion–molecule association reactions yielding N+3, N+4, and (CO)+2;The Journal of Chemical Physics;1991-07-15
4. Mass spectrometric studies of positive ions in r.f. glow discharges;Thin Solid Films;1989-04
5. ANALYSIS OF GLOW DISCHARGES FOR UNDERSTANDING THE PROCESS OF FILM FORMATION;Thin Films from Free Atoms and Particles;1985
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