The status of the database for plasma processing
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/42/i=19/a=194003/pdf
Reference100 articles.
1. International cooperation in plasma processing
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