A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves-Reference-Cited by-同舟云学术

A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves

Published:1995-07-14 Issue:7 Volume:28 Page:1354-1361
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Tatarova E,Zamfirov D

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/28/i=7/a=012/pdf

Reference35 articles.

1. Electron energy distributions and excitation rates in high-frequency argon discharges

2. Theory of a plasma column sustained by a surface wave

4. Modeling of low-pressure microwave discharges in Ar, He, and O/sub 2/: similarity laws for the maintenance field and mean power transfer

5. Self‐consistent modeling of surface wave produced discharges at low pressures

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