Stable high brightness radio frequency driven micro-discharge lamps at 193 (ArF*) and 157 nm ( )
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/37/i=2/a=006/pdf
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1. Imaging of 1-nm-thick films with 193-nm microscopy
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