Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities-Reference-Cited by-同舟云学术

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Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities

Published:2016-05-26 Issue:26 Volume:49 Page:265202
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Stefanović Ilija,Stojanović Vladimir,Boulmer-Leborgne Chantal,Lecas Thomas,Kovacevic Eva,Berndt Johannes

Funder

Region Centre, France

Ministry of Education, Science and Technology Development of Republic of Serbia

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/49/i=26/a=265202/pdf

Reference30 articles.

1. The dominant role of impurities in the composition of high pressure noble gas plasmas

2. Argon metastable dynamics and lifetimes in a direct current microdischarge

3. Detection of long‐living neutral hydrated clusters in laboratory simulation of ionospheric D region plasma

4. Characterization of minority species in reactive plasmas by cryotrap-assisted mass spectrometry

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