Thermal and mechanical phenomena in micromechanical optics
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/37/i=10/a=R01/pdf
Reference43 articles.
1. A micromachined mass-flow sensor with integrated electronics on GaAs
2. A silicon thermal astable multivibrator for flow and temperature sensing
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