Structural improvement of zinc oxide films produced by ion beam assisted reactive sputtering
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference38 articles.
1. Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering
2. Application of Zinc Oxide Varistors
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4. Wide-bandgap high-mobility ZnO thin-film transistors produced at room temperature
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