Plasma–surface interactions at nanoscales: a combinatorial theoretical, process diagnostics and surface microanalysis approach
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/47/i=22/a=224009/pdf
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