Non-lithographic method of forming ordered arrays of silicon pillars and macropores
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/38/i=4/a=017/pdf
Reference35 articles.
1. Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
2. Microstructuring of silicon with femtosecond laser pulses
3. Femtosecond laser-induced formation of spikes on silicon
4. Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask
5. Near-unity below-band-gap absorption by microstructured silicon
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