TiNxOy/TiN dielectric contrasts obtained by ion implantation of {\rm O}_2^+ ; structural, optical and electrical properties-Reference-Cited by-同舟云学术

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TiNxOy/TiN dielectric contrasts obtained by ion implantation of {\rm O}_2^+ ; structural, optical and electrical properties

Published:2011-05-16 Issue:23 Volume:44 Page:235501
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Punzón Quijorna E,Torres Costa V,Agulló-Rueda F,Herrero Fernández P,Climent A,Rossi F,Manso Silván M

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Performance and failure mechanisms of TiN diffusion barrier layers in submicron devices

2. Optical and electronic properties of TiCxNy films

3. Surface plasmon-polariton study of the optical dielectric function of titanium nitride

4. Performance of PVD TiN, TiCN, and TiAlN coated cemented carbide tools in turning

5. Corrosion behavior of sputter-deposited TiN thin films

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoporous Titanium (Oxy)nitride Films as Broadband Solar Absorbers;ACS Applied Materials & Interfaces;2022-04-18

2. Gradual and selective achievement of Rutile-TiO2 by thermal annealing amorphous TixOyNz films;Journal of Non-Crystalline Solids;2022-03

3. Design, synthesis and thermal stability study on graded TiN O solar selective absorbing coating fabricated by pulsed DC reactive magnetron sputtering;Materials Characterization;2021-03

4. Solar thermal harvesting based on self-doped nanocermet: Structural merits, design strategies and applications;Renewable and Sustainable Energy Reviews;2020-12

5. Properties of titanium oxynitride films deposited on glass substrate by reactive high-power pulsed magnetron sputtering;Japanese Journal of Applied Physics;2020-02-26

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