Modelling of a self-sustained discharge-excited ArF excimer laser: the influence of photo-ionization and photodetachment by laser light on the discharge development
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/28/i=3/a=001/pdf
Reference18 articles.
1. Theoretical simulation of spatial-time characteristics of a discharge XeCl excimer laser active medium
2. Microarcs as a termination mechanism of optical pulses in electric-discharge-excited KrF excimer lasers
3. Modeling of the self-sustained, discharge-excited xenon-chloride laser
4. Theoretical evaluation of the buffer gas effects for a self‐sustained discharge ArF laser
5. Simplified and complex modeling of self-sustained discharge-pumped, Ne-buffered XeCl laser kinetics
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1. Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser;Journal of Physics D: Applied Physics;2024-01-04
2. Analysis of preionization effect of excimer laser;Acta Physica Sinica;2023
3. Numerical Analysis of Corona Pre-Ionization for High-Power Discharge-Pumped XeCl* Excimer Lasers;Journal of Nanoelectronics and Optoelectronics;2022-03-01
4. 门控循环网络辨识准分子激光器能量模型;Chinese Journal of Lasers;2021
5. Analysis of ArF excimer laser system discharge characteristics in different buffer gases;Acta Physica Sinica;2020
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