A numerical and experimental investigation of an axially symmetric RF plasma-Reference-Cited by-同舟云学术

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A numerical and experimental investigation of an axially symmetric RF plasma

Published:2012-10-16 Issue:45 Volume:45 Page:455201
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Sutton Yvonne C,Johnson Peter C,Naidis George V,Sharp David,Braithwaite Nicholas St J

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference32 articles.

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