Effect of Addition of Nitrogen to a Capacitively Radio-Frequency Hydrogen Discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/1009-0630/16/i=3/a=06/pdf
Reference22 articles.
1. Characterisation of nitrogen modified diamond-like carbon films deposited by radio-frequency plasma enhanced chemical vapour deposition
2. The Synergistic Effect of N[sub 2]/H[sub 2] Gases in the Plasma Passivation of Siloxane-Based Low-k Polymer Films
3. Plasma Induced Subsurface Reactions for Anisotropic Etching of Organic Low Dielectric Film Employing N2and H2Gas Chemistry
4. Detailed study of the plasma-activated catalytic generation of ammonia in N2-H2 plasmas
5. Effect of mixing of hydrogen into nitrogen plasma
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1. Evaluation and Scale Forecast of Underground Space Resources of Historical and Cultural Cities in China;ISPRS International Journal of Geo-Information;2021-12-31
2. Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model;Acta Physica Sinica;2014
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