The Effect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon
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Published:2013-09
Issue:9
Volume:15
Page:881-884
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ISSN:1009-0630
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Container-title:Plasma Science and Technology
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language:
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Short-container-title:Plasma Sci. Technol.
Author:
Azooz A. A.,Ahmad M. A.
Subject
Condensed Matter Physics