Highest resolution chemical imaging based on secondary ion mass spectrometry performed on the helium ion microscope
Author:
Funder
Fonds National de la Recherche Luxembourg
H2020 European Institute of Innovation and Technology
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1361-6633/ac1e32/pdf
Reference251 articles.
1. Imaging and analytics on the helium ion microscope;Wirtz;Annu. Rev. Anal. Chem.,2019
2. Helium ion microscope: a new tool for nanoscale microscopy and metrology;Ward;J. Vac. Sci. Technol. B,2006
3. The prospects of a subnanometer focused neon ion beam;Rahman;Scanning,2012
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