A laser-generated plasma source for x-ray lithography and VLSI
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/21/i=10/a=011/pdf
Reference14 articles.
1. Contamination Lithography For The Fabrication Of Zone Plate X-Ray Lenses
2. Laser-produced continua for absorption spectroscopy in the VUV and XUV
3. A Small Gas Puff Z-Pinch X-Ray Source
4. Laser‐generated plasma as soft x‐ray source
5. Soft x-ray lithography using radiation from laser-produced plasmas
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1. Impact of laser produced X-rays on the surface of gold;Applied Surface Science;2008-09
2. Influence of the pedestal on the interaction of a high-intensity, ultrashort laser pulse with a gas target;Journal of the Optical Society of America B;2002-11-01
3. Investigation of the interaction of subpicosecond KrF laser pulses with a preformed carbon plasma;Applied Physics B Laser and Optics;1995-12
4. Temporal behavior of x-ray radiation emitted by subpicosecond KrF-laser-heated carbon preplasmas;Physical Review E;1994-12-01
5. Laser plasmas '89;Progress in Quantum Electronics;1990-01
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