Observation and measurement of surface relief of diffraction gratings using electron microscopy techniques
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/2/i=9/a=420/pdf
Reference5 articles.
1. Electron Microscope Method for Measuring Diffraction Grating Groove Geometry
2. High-resolution shadow-casting technique for the electron microscope using the simultaneous evaporation of platinum and carbon
3. Fringe spacing in interference microscopes
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The Design and Manufacture of X-Ray Diffraction Gratings;Optical Systems for Soft X Rays;1986
2. Experimental Verifications and Applications of the Theory;Topics in Current Physics;1980
3. Groove depth determination using a laser for sinusoidal groove gratings;Applied Optics;1977-08-01
4. Diffraction gratings (manufacture);Reports on Progress in Physics;1975-08-01
5. The theory, manufacture, structure and performance of n.p.l. x-ray gratings;Philosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences;1975-01-23
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